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Sulfur Hexafluoride (SF6) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro Electro Mechanical Systems). SF6 is applied in the above process as an etching gas. Due to the density and large molecule size, SF6 is a prefered etching gas in flat panel and MEMS production processes.
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Dead Tank Circuit Breaker for 245 kV / 63 kA Home HV/MV Equipment Circuit Breakers Dead Tank Circuit Breakers (245kV/63kA) Transformers Gas Insulated Substations Circuit Breakers Disconnectors (Switches) Capacitors Reactors SF 6 Alternative g³
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SF6 Gas Servicing Equipment. Sulfur Hexafluoride (SF6) is an excellent gaseous dielectric for high voltage power applications. It has been used extensively in high voltage circuit breakers and other switchgear employed by the power industry. Applications for SF6 include gas insulated transmission lines and gas insulated power distribution substations.
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Sulfur Hexafluoride (SF6) is an inorganic, colorless, odorless, non flammable, extremely potent greenhouse gas, and an excellent electrical insulator. SF6 has an octahedral geometry, consisting of six fluorine atoms attached to a central sulfur atom. It is a hypervalent molecule. Typical for a nonpolar gas, it is poorly soluble in water but
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